| 是否进口：否 | 产地：日本 | 加工定制：否 |
| 品牌：ABB | 型号：Z512, Z522 | 类型：质量流量计 |
| 测量范围：100m3/h | 精度等级：1% | 公称通径：6mm |
| 适用介质：N2 | 工作压力：1MPa | 工作温度：60℃ |
| 规格：50 |
銆�Z514, Z524 DevicenetTM
銆�銆�Mass Flow Controller / Meter
銆�銆�Mass flow controller model *1 SEC-Z514KX SEC-Z514MGX SEC-Z524MGXN SEC-Z524MGX
銆�銆�Mass flow meter model *1 SEF-Z514KX SEF-Z514MGX SEF-Z524MGXN SEF-Z524MGX
銆�銆�Full-scale flow rate MR/MG number
銆�銆�(N2 conversion flow rate) #R01:10SCCM
銆�銆�#R1.5:17.5SCCM
銆�銆�#01:30SCCM
銆�銆�#1.5:55SCCM
銆�銆�#02:100SCCM
銆�銆�#2.5:175SCCM
銆�銆�#03:300SCCM
銆�銆�#3.5:550SCCM
銆�銆�#04:1SLM
銆�銆�#4.5:1.75SLM
銆�銆�#05:3SLM
銆�銆�#5.5:5.5SLM
銆�銆�#06:10SLM
銆�銆�Valve Type
銆�銆�Flow rate at fully closed control valve
銆�銆�Flow rate control range
銆�銆�Flow rate measuring range (SEF)
銆�銆�Operating temperature
銆�銆�Response
銆�銆�Linearity
銆�銆�Repeatability
銆�銆�50 to 300 kPa (d)
銆�銆�#5.5, #06: 100 to 300 kPa (d)
銆�銆�Operating differential pressure (SEF)
銆�銆�MAX. Operating pressure
銆�銆�Pressure resistance
銆�銆�Leak Integrity
銆�銆�Digital interface
銆�銆�Wetted materials
銆�銆�Power supply
銆�銆�1/4 inch VCR equivalent
銆�銆�Option: 1.125 inch IGS
銆�銆�Mounting orientation
銆�銆�*1 The gas type and full scale settings for the SEC(SEF)-Z514MGX and Z524MGXN can be changed by
銆�銆�the operator, using special software.
銆�銆�*2 The flow rate precision guaranteed temperatures conform to SEMI E56-1296 standards. The precision is that
銆�銆�associated with the full-scale MR and MG number values.
銆�銆�*3 IGS: Integrated Gas System
銆�銆�* SCCM and SLM are notations indicating the gas flow rate (mL/min, L/min, at 0掳C and 101.3 kPa).
銆�銆�鈮� 2% F.S.
銆�銆�2-*** of F.S.
銆�銆�0-*** of F.S.
銆�銆�鈮� 1 second: Over full flow rate range
銆�銆�鈮� 卤0.5% F.S.
銆�銆�鈮� 卤0.2% F.S.
銆�銆�卤0.25% F.S. (Flow rate 鈮� 25% F.S.)
銆�銆�Conforming to ODVA standards, DC 24 V, 4.0 VA
銆�銆�450kPa(g)
銆�銆�Operating differential pressure 50 to 300 kPa (d) 200 to 300 kPa (d)
銆�銆�鈮� 300 kPa (d)
銆�銆�1000kPa(g)
銆�銆�鈮� 5 x 10-12Pa路m3/s (He)
銆�銆�DeviceNet聶 Protocol
銆�銆�316L Stainless Steel (polished surface)
銆�銆�Standard Fitting *3 1/4 inch VCR equivalent 1.5 inch IGS
銆�銆�Free
銆�銆�Option: 1.125 inch IGS, 1.5 inch IGS
銆�銆�1/2SCCM
銆�銆�MR/MG number
銆�銆�O: Normally open C: Normally closed
銆�銆�#6.5:22SLM
銆�銆�#07:30SLM
銆�銆�#08:50SLM
銆�銆�Accuracy *2 卤1.0%F.S. 卤1.0% S.P. (Flow rate > 25% F.S.)
銆�銆�5 to 50掳C (recommended temperature range: 15 to 45掳C)
銆�銆�Z514/524 Web Ver.001
銆�銆�Subject to change without notice.
